The student should be made to:
Learn various MEMS fabrication techniques.
Understand different types of sensors and actuators and their principles of operation at the micro scale level.
Know the application of MEMS in different field of medicine.
UNIT I MEMS MATERIALS AND FABRICATION 9
Typical MEMs and Microsystems, materials for MEMS – active substrate materials-Silicon and its compounds, Silicon piezoresistors, Gallium Arsenide, quartz, polymers. Micromachining photolithography, thin film deposition, doping, etching, bulk machining, wafer bonding, LIGA.
UNIT II MECHANICAL AND THERMAL SENSORS AND ACTUATORS 9 Mechanics for MEMs design- static bending of thin plates, mechanical vibration, thermomechanics, fracture and thin film mechanics. Mechanical sensors and actuators – beam and cantilever –microplates, strain, pressure and flow measurements, Thermal sensors and actuators- actuator based on thermal expansion, thermal couples, thermal resistor, Shape memory alloys- Inertia sensor, flow sensor
UNIT III ELECTROSTATIC AND PIEZOELECTRIC SENSORS AND ACTUATORS 9 Parallel plate capacitor, pull in effect, Electrostatic sensors and actuators- Inertia sensor, Pressure sensor, flow sensor, tactile sensor, comb drive. Properties of piezoelectric materials, Piezoelectric sensor and actuator – inchworm motor, inertia sensor, flow sensor.
UNIT IV MICROFLUIDIC SYSTEMS 9
Fluid dynamics, continuity equation, momentum equation, equation of motion, laminar flow in circular conduits, fluid flow in microconduits, in submicrometer and nanoscale. Microscale fluid, expression for liquid flow in a channel, fluid actuation methods, dielectrophoresis, microfluid dispenser, microneedle, micropumps-continuous flow system, micromixers
UNIT V APPLICATIONS OF BIOMEMS 9
CAD for MEMS, Drug delivery, micro total analysis systems (MicroTAS) detection and measurement methods, microsystem approaches to polymerase chain reaction (PCR),DNA sensor, MEMS based drug delivery, Biosensors- sensors for glucose, uric acid, urea and triglyceride sensor. TOTAL: 45 PERIODS
OUTCOMES: At the end of the course, the student should be able to:
Discuss various MEMS fabrication techniques.
Explain different types of sensors and actuators and their principles of operation at the micro Scale level.
Apply MEMS in different field of medicine.
TEXT BOOKS: 1. Tai Ran Hsu, ―MEMS and Microsystems Design and Manufacture‖, Tata McGraw Hill Publishing Company, New Delhi, 2002. (Unit I, II, III & IV). 2. Wanjun Wang, Stephen A.Soper, ‖BioMEMS: Technologies and Applications‖, CRC Press, New York, 2007.(Unit V).
REFERENCES: 1. Marc J. Madou ―Fundamentals of Microfabrication: the Science of Miniaturization‖, CRC Press,2002. 2. Nadim Maluf, Kirt Williams. ―An introduction to Microelectro Mechancial Systems Engineering‖, Second Edition, Artech House Inc, MA, 2004. 3. Chang Liu,‘ Foundations of MEMS‘, Pearson Education International, New Jersey, USA,2006 4. Nitaigour Premchand Mahalik, ―MEMS‖, Tata McGraw Hill Publishing Company, New Delhi, 2007