2017 Regulation EC8001 MEMS and NEMS Syllabus
To introduce the concepts of micro and nano electromechanical devices
To know the fabrication process of Microsystems
To know the design concepts of micro sensors and micro actuators
To introduce the concepts of quantum mechanics and nano systems
UNIT I INTRODUCTION TO MEMS AND NEMS 9
Introduction to Design of MEMS and NEMS, Overview of Nano and Microelectromechanical
Systems, Applications of Micro and Nanoelectromechanical systems, Materials for MEMS and
NEMS: Silicon, silicon compounds, polymers, metals.
UNIT II MEMS FABRICATION TECHNOLOGIES 9
Photolithography, Ion Implantation, Diffusion, Oxidation, CVD, Sputtering Etching techniques,
Micromachining: Bulk Micromachining, Surface Micromachining, LIGA.
UNIT III MICRO SENSORS 9
MEMS Sensors: Design of Acoustic wave sensors, Vibratory gyroscope, Capacitive Pressure
sensors, Case study: Piezoelectric energy harvester
UNIT IV MICRO ACTUATORS 9
Design of Actuators: Actuation using thermal forces, Actuation using shape memory Alloys,
Actuation using piezoelectric crystals, Actuation using Electrostatic forces, Case Study:RF Switch.
UNIT V NANO DEVICES 9
Atomic Structures and Quantum Mechanics, Shrodinger Equation, ZnO nanorods based NEMS
device: Gas sensor.
TOTAL: 45 PERIODS
On successful completion of this course, the student should be able to:
Interpret the basics of micro/nano electromechanical systems including their applications and advantages
Recognize the use of materials in micro fabrication and describe the fabrication processes including surface micromachining, bulk micromachining and LIGA.
Analyze the key performance aspects of electromechanical transducers including sensors and actuators
Comprehend the theoretical foundations of quantum mechanics and Nano systems 94
1. Marc Madou, ―Fundamentals of Microfabrication‖, CRC press 1997.
2. Stephen D. Senturia,‖ Micro system Design‖, Kluwer Academic Publishers,2001
3. Tai Ran Hsu ,‖MEMS and Microsystems Design and Manufacture‖ ,Tata Mcraw Hill, 2002.
4. Chang Liu, ―Foundations of MEMS‖, Pearson education India limited, 2006,
5. Sergey Edward Lyshevski, ―MEMS and NEMS: Systems, Devices, and Structures‖ CRC Press, 2002